The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2019
Filed:
Oct. 08, 2013
Applicant:
Nhk Spring Co., Ltd., Yokohama-shi, JP;
Inventor:
Satoshi Hirano, Kanagawa, JP;
Assignee:
NHK Spring Co., Ltd., Yokohama-shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05B 1/02 (2006.01); B05B 7/14 (2006.01); B05D 1/12 (2006.01); C23C 24/04 (2006.01); B05D 3/04 (2006.01);
U.S. Cl.
CPC ...
B05B 1/02 (2013.01); B05B 7/1481 (2013.01); B05D 1/12 (2013.01); B05D 3/0486 (2013.01); C23C 24/04 (2013.01); B05B 7/1422 (2013.01); B05D 3/0466 (2013.01);
Abstract
A film forming method of forming a film by accelerating powder of a material with gas and spraying and depositing the powder onto a surface of a substrate with the powder being kept in a solid state includes: a substrate film forming step of forming a film. The film forming step includes jetting out the powder and inert gas from a nozzle towards the substrate, causing inside of the chamber to be under positive pressure by the inert gas, and depositing the powder on the surface of the substrate.