The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2019
Filed:
Mar. 03, 2017
Applicant:
Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v., Munich, DE;
Inventors:
Fabian Stoppel, Itzehoe, DE;
Bernhard Wagner, Looft, DE;
Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H04R 17/00 (2006.01); H04R 3/00 (2006.01); H04R 29/00 (2006.01); H01L 41/09 (2006.01);
U.S. Cl.
CPC ...
H04R 17/00 (2013.01); H01L 41/0946 (2013.01); H04R 3/002 (2013.01); H04R 29/001 (2013.01); H04R 2201/003 (2013.01);
Abstract
A MEMS includes a diaphragm, a stroke structure coupled to the diaphragm, and at least two piezoelectric actuators coupled to a plurality of mutually spaced-apart contact points of the stroke structure via a plurality of mutually spaced-apart connecting elements, the at least two piezoelectric actuators being configured to cause a stroke movement of the stroke structure so as to deflect the diaphragm.