The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 09, 2019

Filed:

Dec. 07, 2016
Applicant:

Mitsubishi Electric Corporation, Chiyoda-ku, JP;

Inventors:

Nobuaki Konno, Chiyoda-ku, JP;

Yoshiaki Hirata, Chiyoda-ku, JP;

Yukihisa Yoshida, Chiyoda-ku, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05K 1/03 (2006.01); H05K 3/30 (2006.01); H01L 23/15 (2006.01); H01L 23/13 (2006.01); H05K 1/02 (2006.01); H05K 3/46 (2006.01); H01L 21/48 (2006.01); H01L 23/498 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 23/15 (2013.01); H01L 21/4857 (2013.01); H01L 23/13 (2013.01); H05K 1/02 (2013.01); H05K 1/0306 (2013.01); H05K 3/303 (2013.01); H05K 3/46 (2013.01); H05K 3/4629 (2013.01); H01L 22/30 (2013.01); H01L 23/49822 (2013.01);
Abstract

Each of a plurality of ceramic substrate members includes a via reaching an other main surface from one main surface. A gap is formed in each of first and second ceramic substrate members of the plurality of stacked ceramic substrate members to penetrate each of the first and second ceramic substrate members, the first ceramic substrate member being arranged at an outermost surface on one side in a stacking direction of the ceramic substrate members, the second ceramic substrate member being arranged at an outermost surface on the other side opposite to the one side in the stacking direction. At least a portion of a side surface and a bottom surface within the gap are covered with a protection layer. The protection layer is made of a material having an etching rate lower than that of the ceramic substrate members.


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