The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2019
Filed:
Dec. 01, 2017
Applicant:
Materion Advanced Materials Germany Gmbh, Hanau, DE;
Inventors:
Christoph Simons, Biebergemünd, DE;
Andreas Herzog, Bruchköbel, DE;
Markus Schultheis, Flieden, DE;
Anna Schott, Hösbach, DE;
Assignee:
MATERION ADVANCED MATERIALS GERMANY GMBH, Hanau, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/34 (2006.01); C23C 14/08 (2006.01); C01G 25/02 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3426 (2013.01); C01G 25/02 (2013.01); C23C 14/08 (2013.01); C23C 14/083 (2013.01); C23C 14/3414 (2013.01); C01P 2002/72 (2013.01);
Abstract
The present invention relates to a sputtering target, which comprises a zirconium oxide as a sputtering material, wherein the zirconium oxide