The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2019
Filed:
Jul. 15, 2016
Sensirion Ag, Stäfa, CH;
Mark Hornung, Stäfa, CH;
Thomas Huber, Stäfa, CH;
Philipp Reibisch, Stäfa, CH;
Andreas Rüegg, Stäfa, CH;
SENSIRION AG, Stafa, CH;
Abstract
A mass flow controller () comprises a fluid inlet () and at least one first flow meter () to measure a first flow rate (F) and to output a first flow signal (FS); at least one second flow meter () to measure a second flow (F) rate and to output a second flow signal (FS); a control device () connected to said first and second flow meters () and configured and arranged to generate a control signal (C); and at least one control valve () connected to said control device () to control a total flow rate (F) through the mass flow controller () in response to the control signal (C). The control signal (C) is generated as a function of both the first and second flow signals (FS,FS) such that the mass flow controller's () sensitivity to perturbations of said inlet pressure is minimized.