The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 09, 2019

Filed:

Sep. 02, 2016
Applicant:

Exatec Llc, Wixom, MI (US);

Inventor:

Steven Marc Gasworth, Wixom, MI (US);

Assignee:

EXATEC, LLC, Wixom, MI (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/02 (2006.01); C23C 16/50 (2006.01); C23C 14/56 (2006.01); C23C 16/54 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); C23C 16/44 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 16/50 (2013.01); C23C 14/568 (2013.01); C23C 16/4408 (2013.01); C23C 16/4409 (2013.01); C23C 16/54 (2013.01); H01J 37/32743 (2013.01); H01J 37/32752 (2013.01); H01J 37/32816 (2013.01); H01L 21/67173 (2013.01); H01L 21/67745 (2013.01); H01J 2237/3321 (2013.01);
Abstract

A method for coating substrates with multiple coating layers can comprise: establishing a sub-atmospheric pressure within a coating system; transferring each substrate from outside the coating system to inside the coating system though a transfer lock; heating each substrate in a heating zone before entering a coating zone; traversing the coating zone in a first direction of movement and applying a first coating layer to each substrate in the coating zone using expanding thermal plasma type of plasma enhanced chemical vapor deposition; traversing the coating zone a second time and applying a second coating layer to each substrate in the coating zone using expanding thermal plasma type of plasma enhanced chemical vapor deposition; determining if the coating zone is occupied or vacant; if the coating zone is vacant, purging a heater zone module with inert gas; and pumping the inert gas out of the coating zone through ports located in the coating zone.


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