The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2019
Filed:
Mar. 17, 2015
Asm Ip Holding B.v., Almere, NL;
Bert Jongbloed, Oud-Heverlee, BE;
Dieter Pierreux, Dilbeek, BE;
Cornelius A. van der Jeugd, Heverlee, BE;
Lucian Jdira, Nieuw Vennep, NL;
Radko G. Bankras, Almere, NL;
Theodorus G. M. Oosterlaken, Oudewater, NL;
ASM IP Holding B.V., Almere, NL;
Abstract
In some embodiments, a system is disclosed for delivering hydrogen peroxide to a semiconductor processing chamber. The system includes a process canister for holding a HO/HO mixture in a liquid state, an evaporator provided with an evaporator heater, a first feed line for feeding the liquid HO/HO mixture to the evaporator, and a second feed line for feeding the evaporated HO/HO mixture to the processing chamber, the second feed line provided with a second feed line heater. The evaporator heater is configured to heat the evaporator to a temperature lower than 120° C. and the second feed line heater is configured to heat the feed line to a temperature equal to or higher than the temperature of the evaporator.