The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 09, 2019

Filed:

Jul. 03, 2017
Applicant:

Microjet Technology Co., Ltd., Hsinchu, TW;

Inventors:

Shih-Chang Chen, Hsinchu, TW;

Ying-Lun Chang, Hsinchu, TW;

Hsiang-Dyi Wu, Hsinchu, TW;

Chi-Feng Huang, Hsinchu, TW;

Yung-Lung Han, Hsinchu, TW;

Jia-Yu Liao, Hsinchu, TW;

Jheng-Wei Chen, Hsinchu, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B29C 53/04 (2006.01); F04B 17/00 (2006.01); F04B 43/04 (2006.01); H01L 41/23 (2013.01); H01L 41/25 (2013.01); B41J 2/16 (2006.01); B29C 65/48 (2006.01); B29C 69/00 (2006.01); B29L 31/00 (2006.01);
U.S. Cl.
CPC ...
B41J 2/1623 (2013.01); B29C 53/04 (2013.01); B29C 65/48 (2013.01); B29C 69/00 (2013.01); B41J 2/161 (2013.01); F04B 17/003 (2013.01); F04B 43/046 (2013.01); H01L 41/23 (2013.01); H01L 41/25 (2013.01); B29L 2031/7496 (2013.01); B29L 2031/767 (2013.01);
Abstract

A manufacturing method of a fluid control device is provided. Firstly, a housing, a piezoelectric actuator and a deformable substrate are provided. The piezoelectric actuator includes a piezoelectric element and a vibration plate having a bulge. The deformable substrate includes a flexible plate and a communication plate. The flexible plate includes a movable part. Then, the flexible plate and the communication plate are stacked on and coupled with each other to form the deformable substrate. Then, the housing, the piezoelectric actuator and the deformable substrate are sequentially stacked on each other and coupled with each other. A synchronous deformation process is implemented by applying at least one external force to the deformable substrate, so that the flexible plate and the communication plate of the deformable substrate are subjected to a synchronous deformation, and a specified depth between the movable part and the bulge of the vibration plate is defined.


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