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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10340440 B1

PDFFull Text
Date of Patent:
Jul. 02, 2019

Filed:

Mar. 31, 2016

Electronic device, method for producing electronic device, electronic apparatus, and moving object

Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Tetsuya Otsuki, Fujimi, JP;

Shiro Murakami, Shiojiri, JP;

Tomohiro Arai, Tatsuno, JP;

Mitsuhiro Wada, Matsumoto, JP;

Hiroshi Ito, Suwa, JP;

Manabu Shiraki, Ina, JP;

Manabu Kondo, Matsumoto, JP;

Muneyoshi Hama, Suwa, JP;

Assignee:

Seiko Epson Corporation, , JP;

Attorney:

Harness, Dickey & Pierce, P.L.C.

Primary Examiner:

Thomas M Dougherty

Assistant Examiner:

Karen B Addison

Int. Cl.
CPC ...
H03H 9/02 (2006.01); H01L 41/29 (2013.01); H01L 41/047 (2006.01); H01L 41/08 (2006.01); C23C 14/18 (2006.01); H03H 9/215 (2006.01); H03H 9/05 (2006.01); C23C 14/00 (2006.01); C23C 14/02 (2006.01); C23C 14/06 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01);
U.S. Cl.
CPC ...
H01L 41/0477 (2013.01); C23C 14/0036 (2013.01); C23C 14/025 (2013.01); C23C 14/0641 (2013.01); C23C 14/185 (2013.01); H01L 41/29 (2013.01); H03H 9/02023 (2013.01); H03H 9/0509 (2013.01); H03H 9/0514 (2013.01); H03H 9/0519 (2013.01); H03H 9/0547 (2013.01); H03H 9/131 (2013.01); H03H 9/171 (2013.01); H03H 9/215 (2013.01);
Abstract

An electronic device includes a base material, a first metal film disposed on the base material and containing nitrogen and chromium, and a second metal film disposed on the first metal film and containing gold. In the first metal film, the number of nitrogen atoms may be between 20% to 100% of the number of chromium atoms. Further, the distribution of nitrogen atoms in the first metal film is larger in a third region sandwiched between a first region on the base material side of the first metal film and a second region on the second metal film side than in the first region and in the second region.

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