The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2019
Filed:
Mar. 18, 2016
Applicant:
The Regents of the University of Michigan, Ann Arbor, MI (US);
Inventors:
Stephen R. Forrest, Ann Arbor, MI (US);
Kyusang Lee, Ann Arbor, MI (US);
Dejiu Fan, Ann Arbor, MI (US);
Assignee:
The Regents of the University of Michigan, Ann Arbor, MI (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 31/18 (2006.01); H01L 21/78 (2006.01); C30B 33/08 (2006.01); C09K 13/00 (2006.01); H01L 33/00 (2010.01);
U.S. Cl.
CPC ...
H01L 21/78 (2013.01); H01L 21/7813 (2013.01); H01L 31/1896 (2013.01); C09K 13/00 (2013.01); C30B 33/08 (2013.01); H01L 33/0079 (2013.01); Y02E 10/50 (2013.01);
Abstract
Disclosed herein are methods to eliminate or reduce the peeling-off of epitaxial lifted-off thin film epilayers on secondary host substrates that allow for the fabrication of high yield ELO processed thin film devices. The methods employ patterned strain-relief trenches.