The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 02, 2019

Filed:

Sep. 21, 2015
Applicant:

Kratos Analytical Limited, Manchester, Greater Manchester, GB;

Inventor:

John Mark Allison, Carnforth Cumbria, GB;

Assignee:

KRATOS ANALYTICAL LIMITED, Manchester, Greater Manchester, GB;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 7/00 (2006.01); H01J 49/16 (2006.01);
U.S. Cl.
CPC ...
H01J 49/164 (2013.01); B08B 7/0042 (2013.01); B08B 7/0057 (2013.01); B08B 7/0035 (2013.01);
Abstract

A method of cleaning an ion source. The method includes: at a first reflective surface of a mirror, reflecting light that has a wavelength in a first wavelength band onto a surface of the ion source so that contaminant material is desorbed from the surface of the ion source; at a second reflective surface of the mirror, reflecting light that has a wavelength in a second wavelength band and that comes from the surface of the ion source towards an imaging apparatus for producing an image of the surface of the ion source, wherein the light that has a wavelength in the second wavelength band passes through the first reflective surface of the mirror before being reflected at the second reflective surface of the mirror.


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