The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2019
Filed:
Sep. 23, 2014
Applicant:
Denso Corporation, Kariya, Aichi-pref., JP;
Inventors:
Minekazu Sakai, Kariya, JP;
Kiyomasa Sugimoto, Kariya, JP;
Assignee:
DENSO CORPORATION, Kariya, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/08 (2006.01); G01P 15/125 (2006.01); G01P 15/18 (2013.01); B81B 7/00 (2006.01); H01L 29/84 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
G01P 15/125 (2013.01); B81B 7/0064 (2013.01); G01P 15/0802 (2013.01); G01P 15/18 (2013.01); H01L 29/66007 (2013.01); H01L 29/84 (2013.01); B81B 2201/0235 (2013.01); G01P 2015/0814 (2013.01);
Abstract
In a physical quantity sensor, a contact part that is directly and electrically connected to an external circuit is formed in a support substrate, and the support substrate is maintained at a predetermined potential through the contact part. With this configuration, the support substrate is maintained at the predetermined potential without disposing an electrode in the interior of the semiconductor layer. For that reason, a processing precision can be restrained from being reduced in forming the movable electrode, and hence a detection precision can be restrained from being reduced.