The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 02, 2019

Filed:

Sep. 11, 2014
Applicant:

Hitachi, Ltd., Tokyo, JP;

Inventors:

Itaru Yanagi, Tokyo, JP;

Kenichi Takeda, Tokyo, JP;

Assignee:

HITACHI, LTD., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/447 (2006.01); G01N 33/487 (2006.01); G01N 27/327 (2006.01); B82B 1/00 (2006.01); B82B 3/00 (2006.01); C12Q 1/6869 (2018.01); B81C 1/00 (2006.01); B82Y 5/00 (2011.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
G01N 33/48721 (2013.01); B81C 1/00087 (2013.01); B82B 1/001 (2013.01); B82B 3/0019 (2013.01); C12Q 1/6869 (2013.01); G01N 27/3278 (2013.01); G01N 27/44791 (2013.01); B81B 2203/0127 (2013.01); B82Y 5/00 (2013.01); B82Y 40/00 (2013.01); Y10S 977/888 (2013.01); Y10S 977/89 (2013.01); Y10S 977/924 (2013.01);
Abstract

The membrane of a conventional solid-state nanopore device, which is believed to be promising for understanding the structural characteristics of DNA and determining a nucleotide sequence, has been thick, and the accuracy in determining a nucleotide sequence in the DNA chain has been insufficient. A method characterized by forming a membrane by forming a first film on a first substrate having a surface of Si, then forming a hole in the first film in such a manner that the surface of the first substrate is exposed, then forming a second film on the first film and on the surface of the first substrate and then etching the first substrate with a solution which does not remove the second film.


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