The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2019
Filed:
Jul. 26, 2016
Eugene Technology Co., Ltd., Yongin-Si, Gyeonggi-Do, KR;
Jun Jin Hyon, Gunpo-Si, KR;
Sung Tae Je, Yongin-Si, KR;
Byoung Gyu Song, Yongin-Si, KR;
Yong Ki Kim, Osan-Si, KR;
Kyoung Hun Kim, Yongin-Si, KR;
Chang Dol Kim, Yongin-Si, KR;
Yang Sik Shin, Yongin Si, KR;
Jae Woo Kim, Bucheon-Si, KR;
EUGENE TECHNOLOGY CO., LTD., , KR;
Abstract
Provided is a substrate processing apparatus including a tube having an inner space therein, a substrate supporting unit including a plurality of isolation plates configured to vertically stack a plurality of substrates thereon and divide a processing space, in which the plurality of substrates are processed, into a plurality of processing spaces in the tube, a gas supply unit configured to supply a processing gas to the plurality of substrates, and an exhaust unit disposed to face the gas supply unit to exhaust a gas inside the tube. A plurality of through-holes are defined in each of the isolation plates.