The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2019
Filed:
Nov. 21, 2014
Applicant:
Samsung Electro-mechanics Co., Ltd., Suwon-Si, KR;
Inventors:
Jong Woon Kim, Suwon-Si, KR;
Chang Hyun Lim, Suwon-Si, KR;
Sung Jun Lee, Suwon-Si, KR;
Jong Beom Kim, Suwon-Si, KR;
Assignee:
Samsung Electro-Mechanics Co., Ltd., Suwon-si, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01); G01P 15/08 (2006.01); G01P 15/09 (2006.01); G01P 15/12 (2006.01); G01P 15/18 (2013.01); G01C 19/5705 (2012.01);
U.S. Cl.
CPC ...
B81B 3/0072 (2013.01); G01P 15/09 (2013.01); G01P 15/123 (2013.01); G01P 15/18 (2013.01); B81B 2201/0235 (2013.01); G01C 19/5705 (2013.01); G01P 2015/0842 (2013.01);
Abstract
There is provided a MEMS sensor including: a mass body; a support part floatably supporting the mass body; and a flexible beam having one end connected to the mass body and the other end connected to the support part. At least one end of the flexible beam connected to the mass body or the support part includes a curved portion to maximize an effective length supporting a load.