The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 02, 2019

Filed:

Jun. 16, 2014
Applicant:

Brooks Automation, Inc., Chelmsford, MA (US);

Inventors:

Christopher Hofmeister, Hampstead, NH (US);

Alexander G. Krupyshev, Chelmsford, MA (US);

Krysztof A. Majczak, Beverly, MA (US);

Martin Hosek, Lowell, MA (US);

Jay Krishnasamy, Billerica, MA (US);

Assignee:

Brooks Automation, Inc., Chelmsford, MA (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B25J 9/04 (2006.01); B25J 9/10 (2006.01); B25J 9/12 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01); B25J 11/00 (2006.01);
U.S. Cl.
CPC ...
B25J 9/106 (2013.01); B25J 9/126 (2013.01); H01L 21/67742 (2013.01); B25J 11/0095 (2013.01); H01L 21/68707 (2013.01); Y10S 414/141 (2013.01); Y10S 901/15 (2013.01); Y10S 901/21 (2013.01); Y10S 901/23 (2013.01); Y10S 901/27 (2013.01); Y10T 74/20305 (2015.01); Y10T 74/20317 (2015.01); Y10T 74/20329 (2015.01);
Abstract

A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration.


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