The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 02, 2019

Filed:

Apr. 04, 2017
Applicant:

Sakai Display Products Corporation, Osaka, JP;

Inventors:

Katsuhiko Kishimoto, Oskaka, JP;

Koshi Nishida, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23Q 3/15 (2006.01); C23C 14/04 (2006.01); C23C 14/24 (2006.01); C23C 14/34 (2006.01); H05B 33/10 (2006.01); H01L 51/50 (2006.01);
U.S. Cl.
CPC ...
B23Q 3/15 (2013.01); C23C 14/042 (2013.01); C23C 14/24 (2013.01); C23C 14/34 (2013.01); H05B 33/10 (2013.01); H01L 51/5056 (2013.01); H01L 51/5092 (2013.01);
Abstract

A vapor deposition apparatus disclosed in an embodiment is configured to allow an electromagnet () to attract a vapor deposition mask, and comprises a control circuit () connected between the electromagnet () and a power supply circuit () for driving the electromagnet (). The control circuit gradually changes a magnetic field to be generated by the electromagnet () when a current is applied to the electromagnet (). As a result, the change in current to flow in an electromagnetic coil () of the electromagnet () becomes gradual and an effect of electromagnetic induction is reduced, thereby suppressing the defect of elements formed on a substrate for vapor deposition or the deterioration in property of the element.


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