The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 25, 2019

Filed:

Aug. 11, 2017
Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo-shi, Kyoto-fu, JP;

Inventors:

Tomoyuki Ashimine, Nagaokakyo, JP;

Takashi Komiyama, Nagaokakyo, JP;

Toshiyuki Nakaiso, Nagaokakyo, JP;

Assignee:

MURATA MANUFACTURING CO., LTD., Nagaokakyo-Shi, Kyoto-Fu, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/02 (2006.01); H01L 21/822 (2006.01); H01L 21/3205 (2006.01); H01L 23/522 (2006.01); H01L 21/768 (2006.01); H01L 27/04 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
H01L 27/0288 (2013.01); H01L 21/3205 (2013.01); H01L 21/768 (2013.01); H01L 21/822 (2013.01); H01L 23/522 (2013.01); H01L 23/5223 (2013.01); H01L 23/5228 (2013.01); H01L 27/0255 (2013.01); H01L 27/04 (2013.01); H01L 28/20 (2013.01); H01L 28/90 (2013.01);
Abstract

A thin-film device is provided with high reliability that prevents breakage of a thin-film resistance element due to stress caused by expansion of a resin layer. Thin-film resistance elements can be pressed against a substrate with a first constraint thin film that is formed on a resin layer arranged on a resin layer at the opposite side to the substrate so as to overlap with the thin-film resistance elements when seen in the plan view of the device. Therefore, bending stress that is applied to the thin-film resistance elements due to expansion of the resin layers in a high-temperature state can be moderated to thereby prevent breakage of the thin-film resistance elements due to stress caused by the expansion of the resin layers.


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