The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 25, 2019

Filed:

Feb. 01, 2017
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Chun Yu Wong, Ballston Lake, NY (US);

Jagar Singh, Clifton Park, NY (US);

Ashish Baraskar, Milpitas, CA (US);

Min-hwa Chi, Malta, NY (US);

Assignee:

GLOBALFOUNDRIES Inc., Grand Cayman, KY;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01); H01L 23/525 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 21/02 (2006.01); H01L 21/3205 (2006.01); H01L 21/283 (2006.01); H01L 27/112 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5256 (2013.01); H01L 21/0226 (2013.01); H01L 21/283 (2013.01); H01L 21/3205 (2013.01); H01L 29/0673 (2013.01); H01L 29/66795 (2013.01); H01L 29/785 (2013.01); H01L 21/02532 (2013.01); H01L 21/02639 (2013.01); H01L 27/11206 (2013.01);
Abstract

Semiconductor fuses with nanowire fuse links and fabrication methods thereof are presented. The methods include, for instance: fabricating a semiconductor fuse, the semiconductor fuse including at least one nanowire fuse link, and the fabricating including: forming at least one nanowire, the at least one nanowire including a semiconductor material; and reacting the at least one nanowire with a metal to form the at least one nanowire fuse link of the semiconductor fuse, the at least one nanowire fuse link including a semiconductor-metal alloy. In another aspect, a structure is presented. The structure includes: a semiconductor fuse, the semiconductor fuse including: at least one nanowire fuse link, the at least one nanowire fuse link including a semiconductor-metal alloy.


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