The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2019
Filed:
Mar. 27, 2015
Applicant:
Sandisk Technologies Llc, Plano, TX (US);
Inventor:
Atsuyoshi Koike, Tokyo, JP;
Assignee:
SANDISK TECHNOLOGIES LLC, Plano, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B65G 51/03 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67784 (2013.01); B65G 51/03 (2013.01); H01L 21/6773 (2013.01); H01L 21/67733 (2013.01); H01L 21/67736 (2013.01);
Abstract
A wafer transport system includes a pod that contains one or more wafers in an enclosed environment, a substrate transport surface that extends substantially along a plane, intersecting at least first and second loading/unloading locations, and a pod controller that is configured to control movement of the pod by selecting a pathway from a plurality of available pathways extending along the substrate transport surface from the first loading/unloading location to the second loading/unloading location.