The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2019
Filed:
Nov. 28, 2016
Asm Ip Holding B.v., Almere, NL;
Taku Omori, Akiruno, JP;
ASM IP Holding B.V., Almere, NL;
Abstract
A substrate processing system includes a module controller that creates a log file in which a data count corresponding to timing of sampling operation data is added to the operation data of a module sampled in a predetermined sampling period, a main control apparatus that is connected to the module controller, receives the log file and start time information indicating a time at which collection of the operation data included in the log file starts from the module controller, converts the data count to a time stamp from the start time information and creates a data file including the time stamp and the operation data, and a host computer that receives the data file provided from the main control apparatus.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile