Dynamic-magnetic steel magnet levitation double-workpiece-stage vector arc switching method and apparatus based on wireless energy transmission

Abstract

A dynamic-magnetic steel magnetic levitation double-workpiece-stage vector arc switching method and apparatus based on wireless energy transmission, falling within the semiconductor manufacturing equipment technology. The apparatus comprises a support frame (), a balance mass block (), magnetic levitation workpiece stages (), a workpiece stage measurement apparatus, wireless energy transmission apparatuses () and a wireless energy receiving apparatus (), wherein the two workpiece stages work between a measurement site () and an exposure site (); a laser interferometer () is used to measure the positions of the workpiece stages; the wireless energy transmission apparatuses () are used to provide energy for a sensor () in a micro-drive stage; the workpiece stages are driven using a magnetic levitation planar electrical motor; and during a double-workpiece-stage switching process, the planar electrical motor is used to drive the two workpiece stages so as to achieve single-beat arc quick switching. By using the method and apparatus, the problem that an existing stage switching scheme has many beats, a long track, many start-stop links and a long time for stabilization is solved, thereby reducing the stage switching links, shortening the stage switching time, and improving the productivity of a lithography machine.