The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2019
Filed:
Feb. 01, 2016
Applicant:
Toshiba Memory Corporation, Minato-ku, JP;
Inventors:
Takahito Nishimura, Kuwana, JP;
Jun Iijima, Yokkaichi, JP;
Assignee:
TOSHIBA MEMORY CORPORATION, Minato-ku, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01);
Abstract
According to one embodiment, an imprinting apparatus is provided. The imprinting apparatus includes a controller that controls a resist drop position on a wafer to be imprinted with a pattern, using a first resist drop recipe corresponding to a first topography of the wafer.
Nishimura, Takahito. (2019). Imprinting apparatus, recording medium, and imprinting method (U.S. Patent No. 10331028). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10331028
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile