The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2019
Filed:
Dec. 01, 2016
The Regents of the University of California, Oakland, CA (US);
Ali Javey, Lafayette, CA (US);
Hiroshi Shiraki, Berkeley, CA (US);
Hossain Fahad, Berkeley, CA (US);
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA, Oakland, CA (US);
Abstract
A system and method for chemical sensing of multiple gases or vapors with an array of chemical sensitive field effect transistor (CS-FET) devices that are highly sensitive, small in size and have low energy consumption. The sensor layer is an ultrathin film of transition metal oxide, rare earth metal oxide or metal nanoparticles that is formed between the source and drain electrodes on a silicon substrate. The work functions of the sensor layer can be manipulated by the adsorption of chemicals onto their surfaces. These changes cause a change in the surface potential of the underlying Si channel, leading to the current modulation of the devices. By selecting appropriate sensor layers, different chemicals will produce different output signals. External signal processing of these signals enables and sensor and array profile matching permits multi-gas detection.