The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 25, 2019

Filed:

Jun. 08, 2015
Applicant:

Endress + Hauser Gmbh + Co. KG, Maulburg, DE;

Inventors:

Rafael Teipen, Berlin, DE;

Benjamin Lemke, Berlin, DE;

Assignee:

ENDRESS+HAUSER SE+CO.KG, Maulburg, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 13/02 (2006.01); G01L 9/00 (2006.01);
U.S. Cl.
CPC ...
G01L 9/0073 (2013.01); G01L 13/025 (2013.01);
Abstract

A pressure difference sensor includes first and second counterelectrodes, a conductive disk between the counterelectrodes, a first insulating layer connecting an outer edge of the disk with an outer edge of the first counterelectrode forming a first pressure chamber, a second insulating layer connecting an outer edge of the disk with an outer edge of the second counterelectrode forming a second pressure chamber, an opening in the first counterelectrode, via which the first pressure chamber is contactable with a first pressure, and an opening in the second counterelectrode, via which the second pressure chamber is contactable with a second pressure. The disk is divided into inner and outer regions, the inner region includes a measuring membrane arranged between the two pressure chambers and an edge region, the inner region forms with each of the counterelectrodes a capacitor having a capacitance dependent on a pressure difference acting on the measuring membrane.


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