The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2019
Filed:
Apr. 13, 2016
Applicant:
Nikon Corporation, Tokyo, JP;
Inventors:
Yasutaka Nishi, Tokyo, JP;
Makoto Nakazumi, Yamato, JP;
Assignee:
NIKON CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 3/00 (2006.01); C08J 7/18 (2006.01); G21H 5/00 (2006.01); B05D 1/02 (2006.01); G06F 3/044 (2006.01); B05D 3/06 (2006.01); G06F 3/041 (2006.01); C23C 24/00 (2006.01); C23C 24/08 (2006.01); B05D 1/00 (2006.01);
U.S. Cl.
CPC ...
B05D 1/02 (2013.01); B05D 3/065 (2013.01); C23C 24/00 (2013.01); C23C 24/08 (2013.01); G06F 3/041 (2013.01); G06F 3/044 (2013.01); B05D 1/60 (2013.01); G06F 2203/04103 (2013.01);
Abstract
In order to provide a novel method of obtaining a thin film to replace the related art, provided is a method of manufacturing a thin film, including: generating mist of a dispersion liquid containing fine particles; supplying the generated mist of the dispersion liquid onto a substrate; and drying the dispersion liquid supplied onto the substrate.