The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 18, 2019

Filed:

Mar. 02, 2015
Applicant:

Shimadzu Corporation, Kyoto-shi, Kyoto, JP;

Inventor:

Toshiya Habu, Kyoto, JP;

Assignee:

SHIMADZU CORPORATION, Kyoto-shi, Kyoto, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H03H 7/38 (2006.01); H03H 7/40 (2006.01); H05H 1/46 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H05H 1/46 (2013.01); H01J 37/321 (2013.01); H01J 37/32183 (2013.01); H01J 37/32091 (2013.01); H03H 7/38 (2013.01); H03H 7/40 (2013.01); H05H 2001/4645 (2013.01); H05H 2001/4682 (2013.01);
Abstract

PROBLEM: To improve the stability of the process of the plasma ignition, by allowing a high current to pass through an induction coil without increasing the power-supply voltage in the process of the plasma ignition. SOLUTION: An impedance conversion circuitincluding an inductorand a capacitoris arranged between a full-bridge drive circuitfor switching DC voltage and an LC resonance circuitincluding an induction coilfor plasma generation. The capacitance of the capacitorcan be varied between two levels, with a switching driverserving as a switcher. When the plasma is to be ignited, the capacitance of the capacitoris set at the higher level to allow a high current to be supplied to the LC resonance circuitAfter the plasma is brought into a steady state of lighting, the capacitance of the capacitoris changed to the lower level at which an impedance matching is achieved so as to maximize the power efficiency.


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