The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 18, 2019
Filed:
Aug. 30, 2017
Applicant:
Kabushiki Kaisha Toshiba, Minato-ku, JP;
Inventors:
Hisao Miyazaki, Yokohama, JP;
Tadashi Sakai, Yokohama, JP;
Yasutaka Nishida, Tama, JP;
Takashi Yoshida, Kashiwa, JP;
Yuichi Yamazaki, Inagi, JP;
Masayuki Katagiri, Tsukuba, JP;
Naoshi Sakuma, Yokohama, JP;
Assignee:
Kabushiki Kaisha Toshiba, Minato-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 23/522 (2006.01); H01L 23/532 (2006.01); H01L 21/3205 (2006.01); H01L 21/3213 (2006.01); H01L 27/1157 (2017.01); H01L 27/11524 (2017.01); H01L 27/11556 (2017.01); H01L 27/11582 (2017.01);
U.S. Cl.
CPC ...
H01L 23/53276 (2013.01); H01L 21/32055 (2013.01); H01L 21/32135 (2013.01); H01L 21/32139 (2013.01); H01L 21/76877 (2013.01); H01L 21/76892 (2013.01); H01L 23/5226 (2013.01); H01L 23/5329 (2013.01); H01L 23/53271 (2013.01); H01L 27/1157 (2013.01); H01L 27/11524 (2013.01); H01L 27/11556 (2013.01); H01L 27/11582 (2013.01);
Abstract
A graphene wiring structure of an embodiment has: an amorphous or polycrystalline insulating film; and a multilayer graphene on the insulating film. The multilayer graphene including a plurality of graphene crystals having a zigzag direction is oriented at 17 degrees or less with respect to an electric conduction direction on the insulating film.