The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 18, 2019

Filed:

Mar. 10, 2017
Applicant:

Honeywell International Inc., Morris Plains, NJ (US);

Inventors:

Viorel Georgel Dumitru, Prahova, RO;

Viorel Avramescu, Bucharest, RO;

Octavian Buiu, Bucharest, RO;

Mihai Brezeanu, Bucharest, RO;

Bogdan Serban, Bucharest, RO;

Assignee:

Honeywell International Inc., Morris Plains, NJ (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/12 (2006.01); H01L 41/18 (2006.01); G01N 27/414 (2006.01); H01L 29/788 (2006.01); H01L 41/107 (2006.01); H01L 41/113 (2006.01);
U.S. Cl.
CPC ...
G01N 27/121 (2013.01); G01N 27/414 (2013.01); H01L 29/788 (2013.01); H01L 41/107 (2013.01); H01L 41/183 (2013.01); H01L 41/1132 (2013.01);
Abstract

An illustrative humidity sensor may include a substrate and a sensing field effect transistor. The sensing field effect transistor may comprise a source formed on the substrate, a drain formed on the substrate, a gate, and a piezoelectric layer disposed over the gate. Another illustrative humidity sensor may comprise a substrate, a semi-conductor layer disposed over the substrate, a piezoelectric layer disposed over the semi-conductor layer, a first electrode disposed on the piezoelectric layer, and a second electrode disposed on the piezoelectric layer. In some instances, the piezoelectric layer may comprise aluminum nitride.


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