The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 18, 2019
Filed:
Mar. 03, 2017
Applicant:
Integrated Dynamics Engineering Gmbh, Raunheim, DE;
Inventors:
Assignee:
Integrated Dynamics Engineering GmbH, Raunheim, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25J 15/00 (2006.01); B25J 18/02 (2006.01); B66C 23/20 (2006.01); B66F 9/12 (2006.01); B66F 7/00 (2006.01); B66F 9/10 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
B66F 7/00 (2013.01); B25J 15/0014 (2013.01); B25J 18/025 (2013.01); B66C 23/208 (2013.01); B66F 9/10 (2013.01); B66F 9/12 (2013.01); H01L 21/67742 (2013.01);
Abstract
A maintenance apparatus, in particular for lifting and moving components of a system for processing semiconductor devices. The apparatus comprises a beam and an arm with means for lifting a component, the arm being mounted to the beam via a connecting unit and so as to be pivotable in a horizontal plane, wherein the connecting unit is displaceable along the beam, and wherein the arm is displaceable perpendicularly to the beam, and wherein a load accommodation means is provided on the pivotable arm.