The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 18, 2019

Filed:

Nov. 24, 2010
Applicants:

Makoto Nakano, Hamamatsu, JP;

Takashi Inoue, Hamamatsu, JP;

Shinji Kohyama, Hamamatsu, JP;

Inventors:

Makoto Nakano, Hamamatsu, JP;

Takashi Inoue, Hamamatsu, JP;

Shinji Kohyama, Hamamatsu, JP;

Assignee:

HAMAMATSU PHOTONICS K.K., Hamamatsu-shi, Shizuoka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/00 (2014.01); B23K 26/06 (2014.01); B23K 26/067 (2006.01); B23K 26/53 (2014.01); B28D 5/00 (2006.01); B23K 26/03 (2006.01); B23K 26/08 (2014.01); B23K 26/0622 (2014.01); B23K 26/40 (2014.01); B23K 26/354 (2014.01); H01L 33/00 (2010.01); B23K 101/40 (2006.01); B23K 103/00 (2006.01);
U.S. Cl.
CPC ...
B28D 5/0011 (2013.01); B23K 26/0006 (2013.01); B23K 26/03 (2013.01); B23K 26/0622 (2015.10); B23K 26/0676 (2013.01); B23K 26/0853 (2013.01); B23K 26/354 (2015.10); B23K 26/40 (2013.01); B23K 26/53 (2015.10); B23K 2101/40 (2018.08); B23K 2103/50 (2018.08); B23K 2103/56 (2018.08); H01L 33/0095 (2013.01);
Abstract

Laser lights Lto Lare relatively moved along a line to cut, while repeating a converging step of simultaneously converging the laser lights Lto Lat converging positions Pto Pseparated from each other along the line. This forms a plurality of modified spots S along the lineand causes the plurality of modified spots S to form a modified region. The converging positions Pto Pin the repeated converging steps are kept from being superposed on each other, while at least one of converging positions Pto Pin the converging step in a later stage is located between converging positions Pto Pin the converging step in an earlier stage.


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