logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10319872 B1

PDFFull Text
Date of Patent:
Jun. 11, 2019

Filed:

May. 10, 2012

Cost-efficient high power pecvd deposition for solar cells

Applicants:

Tze-chiang Chen, Yorktown Heights, NY (US);

Augustin J. Hong, White Plains, NY (US);

Jeehwan Kim, Los Angeles, CA (US);

Devendra K. Sadana, Pleasantville, NY (US);

Inventors:

Tze-Chiang Chen, Yorktown Heights, NY (US);

Augustin J. Hong, White Plains, NY (US);

Jeehwan Kim, Los Angeles, CA (US);

Devendra K. Sadana, Pleasantville, NY (US);

Assignee:

INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US);

Attorneys:

Tutunjian & Bitetto, P.C.

Erik Johnson

Primary Examiner:

Lex H Malsawma

Assistant Examiner:

Eric W Jones

Int. Cl.
CPC ...
H01L 31/076 (2012.01); H01L 31/077 (2012.01); C23C 16/50 (2006.01); H01L 31/20 (2006.01); H01L 21/02 (2006.01); C23C 16/02 (2006.01); H01L 31/0216 (2014.01); H01L 31/0368 (2006.01); H01L 31/0376 (2006.01); H01L 31/0392 (2006.01); C23C 16/455 (2006.01); C23C 16/515 (2006.01); H01L 31/0224 (2006.01); H01L 31/065 (2012.01); H01L 31/18 (2006.01); H01L 31/056 (2014.01);
U.S. Cl.
CPC ...
H01L 31/077 (2013.01); C23C 16/0272 (2013.01); C23C 16/45523 (2013.01); C23C 16/45557 (2013.01); C23C 16/50 (2013.01); C23C 16/515 (2013.01); H01L 21/0262 (2013.01); H01L 21/02532 (2013.01); H01L 31/02167 (2013.01); H01L 31/022466 (2013.01); H01L 31/022475 (2013.01); H01L 31/022483 (2013.01); H01L 31/03682 (2013.01); H01L 31/03687 (2013.01); H01L 31/03762 (2013.01); H01L 31/03921 (2013.01); H01L 31/056 (2014.12); H01L 31/065 (2013.01); H01L 31/1816 (2013.01); H01L 31/20 (2013.01); Y02E 10/52 (2013.01); Y02E 10/546 (2013.01); Y02E 10/548 (2013.01);
Abstract

A method for forming a photovoltaic device includes providing a substrate. A layer is deposited to form one or more layers of a photovoltaic stack on the substrate. The depositing of the amorphous layer includes performing a high power flash deposition for depositing a first portion of the layer. A low power deposition is performed for depositing a second portion of the layer.

Find Patent Forward Citations

Loading…