The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2019
Filed:
Dec. 23, 2015
Applicant:
Massachusetts Institute of Technology, Cambridge, MA (US);
Inventors:
Akintunde I. Akinwande, Newton, MA (US);
Stephen Angelo Guerrera, Waitsfield, VT (US);
Assignee:
Massachusetts Institute of Technology, Cambridge, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 29/86 (2006.01); H01L 29/06 (2006.01); H01L 29/12 (2006.01); G01L 21/34 (2006.01); H01J 29/48 (2006.01); H01J 29/56 (2006.01); H01J 29/62 (2006.01); H01J 1/304 (2006.01); H01J 3/02 (2006.01);
U.S. Cl.
CPC ...
H01J 29/86 (2013.01); G01L 21/34 (2013.01); H01J 1/3042 (2013.01); H01J 3/022 (2013.01); H01J 29/481 (2013.01); H01J 29/566 (2013.01); H01J 29/62 (2013.01); H01J 2229/4817 (2013.01); H01J 2229/5635 (2013.01);
Abstract
Example compact modular electron beam units are provided that can be used to generate electron beams using field emitter elements. A modular electron beam unit may comprise an electron beam source including a base portion, at least one field emitter element coupled to the base portion, the field emitter element including a field emitter tip, at least one gate electrode and a membrane window disposed over the at least one gate electrode.