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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10317346 B1

PDFFull Text
Date of Patent:
Jun. 11, 2019

Filed:

Aug. 30, 2012

Method and device for inspecting spatial light modulator, and exposure method and device

Applicant:

Tomoharu Fujiwara, Gyoda, JP;

Inventor:

Tomoharu Fujiwara, Gyoda, JP;

Assignee:

NIKON CORPORATION, Tokyo, JP;

Attorney:

Shapiro, Gabor and Rosenberger, PLLC

Primary Examiner:

Peter B Kim

Int. Cl.
CPC ...
G03B 27/54 (2006.01); G01N 21/95 (2006.01); G02B 26/06 (2006.01); G03F 7/20 (2006.01); G06T 7/00 (2017.01); G01N 21/55 (2014.01);
U.S. Cl.
CPC ...
G01N 21/95 (2013.01); G01N 21/55 (2013.01); G02B 26/06 (2013.01); G03F 7/70058 (2013.01); G03F 7/7065 (2013.01); G03F 7/70291 (2013.01); G03F 7/70425 (2013.01); G06T 7/0004 (2013.01); G01N 2021/9511 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/30148 (2013.01);
Abstract

A method for inspecting a spatial light modulator includes: performing such control that in an inspection target area in an array of mirror elements, the mirror elements in a first state in which incident light is given a phase change amount of 0 and the mirror elements in a second state in which incident light is given a phase change amount of 180° (π) become arrayed in a checkered pattern; guiding light having passed the inspection target area to a projection optical system with a resolution limit coarser than a width of an image of one mirror element, to form a spatial image; and inspecting a characteristic of the spatial light modulator from the spatial image. This method allows us to readily perform the inspection of the characteristic of the spatial light modulator having the array of optical elements.

Find Patent Forward Citations

Fujiwara, Tomoharu. (2019). Method and device for inspecting spatial light modulator, and exposure method and device (U.S. Patent No. 10317346). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10317346

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