The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 11, 2019

Filed:

Aug. 03, 2016
Applicant:

Olympus Corporation, Tokyo, JP;

Inventors:

Akira Sato, Tokyo, JP;

Shinichi Takimoto, Tokyo, JP;

Assignee:

OLYMPUS CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 3/28 (2006.01); G01N 21/27 (2006.01); G01N 21/65 (2006.01); G01J 3/00 (2006.01); G01J 3/44 (2006.01);
U.S. Cl.
CPC ...
G01N 21/27 (2013.01); G01J 3/00 (2013.01); G01J 3/28 (2013.01); G01J 3/44 (2013.01); G01N 21/65 (2013.01); G01J 2003/283 (2013.01); G01N 2201/12 (2013.01);
Abstract

A spectral measurement method of the present invention includes: a measuring step of measuring optical spectra of some sections specified among a plurality of sections on a specimen; a scalar-value calculating step of calculating, for individual measured sections, scalar values that represent information contained in the obtained optical spectra; an interpolating step of interpolating scalar values of unmeasured sections by using the calculated scalar values and by using two types of interpolation methods; an identifying step of identifying sections in which absolute values of differences between the two scalar values interpolated by using the two types of interpolation methods are equal to or greater than a predetermined threshold; and a repeating step of re-executing steps from the measuring step to the identifying step after specifying the identified sections.


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