The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2019
Filed:
Jul. 21, 2014
Boe Technology Group Co., Ltd., Beijing, CN;
Ze Liu, Beijing, CN;
BOE TECHNOLOGY GROUP CO., LTD., Beijing, CN;
Abstract
The invention provides a vacuum evaporation device, belongs to the field of vacuum evaporation and can solve the problem of non-uniform thickness of a coating film formed by an existing vacuum evaporation device. The vacuum evaporation device provided by the present invention comprises an evaporation chamber, at least one evaporation source device disposed in the evaporation chamber, and a baffle assembly disposed between the evaporation source device and a substrate to be evaporated. The evaporation source device is disposed within the center region of a base plate of the evaporation chamber. The baffle assembly is provided with a baffle assembly opening used for allowing evaporation substances to pass therethrough and corresponding to the position of the evaporation source device. As the evaporation source device is disposed within the center region of the evaporation chamber, the thickness of a coating film formed on the surface of the substrate is more uniform.