The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 11, 2019

Filed:

Jun. 14, 2018
Applicant:

Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;

Inventors:

Federico Maspero, Cantu, IT;

Loic Joet, Claix, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/84 (2006.01); B81B 7/02 (2006.01); B81B 3/00 (2006.01); G01P 15/125 (2006.01); B81B 5/00 (2006.01); G01P 15/08 (2006.01);
U.S. Cl.
CPC ...
B81B 7/02 (2013.01); B81B 3/0051 (2013.01); B81B 3/0062 (2013.01); B81B 5/00 (2013.01); G01P 15/125 (2013.01); B81B 3/0018 (2013.01); B81B 2201/0235 (2013.01); B81B 2203/04 (2013.01); G01P 2015/0822 (2013.01);
Abstract

Microelectromechanical and/or nanoelectromechanical device comprising a support and at least one moveable element so as to be able to be displaced translationally with respect to the support, a means (G) for translationally guiding said element, said guiding means (G) comprising two rigid arms (), a rotating articulation () between each arm () and the moveable element () and a rotating articulation () between each arm () and the support, the guiding means (G) also comprising a coupling articulation () between the two arms having at least rotating articulation, said rotating articulations having axes of rotation at least parallel with each other such that during a translational displacement of the moveable element () the arms () pivot with respect to each other in opposite directions, the rotating articulations being made by torsionally deformable beams.


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