The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2019
Filed:
Feb. 23, 2016
Hamamatsu Photonics K.k., Hamamatsu-shi, Shizuoka, JP;
HAMAMATSU PHOTONICS K.K., Hamamatsu-shi, Shizuoka, JP;
Abstract
A silicon substratehas a main face in a (100) plane, whereby a fracturegenerated from a molten processed regionacting as a start point extends in a cleavage direction of the silicon substrate(a direction orthogonal to the main face of the silicon substrate). Here, a rear faceof an object to be processedA and a front faceof an object to be processed for separationA are bonded to each other by anode bonding, whereby the fracturereaches a front faceof the objectA continuously without substantially changing its direction. When generating a stress in the object for separationA, the fracturehas reached a rear faceof the object for separationA and thus easily extends toward the objectA.