The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 11, 2019

Filed:

Feb. 23, 2016
Applicant:

Hamamatsu Photonics K.k., Hamamatsu-shi, Shizuoka, JP;

Inventors:

Hideki Shimoi, Hamamatsu, JP;

Naoki Uchiyama, Hamamatsu, JP;

Daisuke Kawaguchi, Hamamatsu, JP;

Assignee:

HAMAMATSU PHOTONICS K.K., Hamamatsu-shi, Shizuoka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 38/00 (2006.01); B32B 37/06 (2006.01); B23K 26/53 (2014.01); B28D 5/00 (2006.01); H01L 21/78 (2006.01); B23K 26/40 (2014.01); B23K 101/40 (2006.01); B23K 103/00 (2006.01);
U.S. Cl.
CPC ...
B32B 37/06 (2013.01); B23K 26/40 (2013.01); B23K 26/53 (2015.10); B28D 5/00 (2013.01); B28D 5/0011 (2013.01); B32B 38/0004 (2013.01); H01L 21/78 (2013.01); B23K 2101/40 (2018.08); B23K 2103/50 (2018.08); Y10T 29/49002 (2015.01); Y10T 29/49787 (2015.01); Y10T 156/1052 (2015.01);
Abstract

A silicon substratehas a main face in a (100) plane, whereby a fracturegenerated from a molten processed regionacting as a start point extends in a cleavage direction of the silicon substrate(a direction orthogonal to the main face of the silicon substrate). Here, a rear faceof an object to be processedA and a front faceof an object to be processed for separationA are bonded to each other by anode bonding, whereby the fracturereaches a front faceof the objectA continuously without substantially changing its direction. When generating a stress in the object for separationA, the fracturehas reached a rear faceof the object for separationA and thus easily extends toward the objectA.


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