The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2019
Filed:
Mar. 03, 2016
Interface Optoelectronics (Shenzhen) Co., Ltd., Shenzhen, CN;
General Interface Solution Limited, Miaoli County, TW;
Chen-Chu Hsu, Guangdong, CN;
Ying-Hung Tsai, Guangdong, CN;
Wei-Chung Chuang, Guangdong, CN;
Somnath Mondal, Guangdong, CN;
INTERFACE OPTOELECTRONICS (SHENZHEN) CO., LTD., Shenzhen, CN;
GENERAL INTERFACE SOLUTION LIMITED, Miaoli County, TW;
Abstract
A method of manufacturing a piezoelectric element includes: forming a patterned mask layer over a substrate, in which the patterned mask layer has an opening exposing a portion of the substrate; forming a piezoelectric element in the opening; and removing the patterned mask layer to obtain the piezoelectric element, in which the piezoelectric element has a central portion and a peripheral portion adjacent to the central portion, and the peripheral portion has a maximum height greater than a height of the central portion.