The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2019
Filed:
Aug. 24, 2016
Applicant:
Murata Manufacturing Co., Ltd., Nagaokakyo-shi, Kyoto-fu, JP;
Inventors:
Shinsuke Ikeuchi, Nagaokakyo, JP;
Toshimaro Yoneda, Nagaokakyo, JP;
Yoshitaka Matsuki, Nagaokakyo, JP;
Naoyuki Endo, Nagaokakyo, JP;
Assignee:
MURATA MANUFACTURING CO., LTD., Nagaokakyo-Shi, Kyoto-Fu, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); C23C 14/08 (2006.01); H01L 41/316 (2013.01); H01L 41/332 (2013.01); C04B 35/465 (2006.01); C04B 35/622 (2006.01); C23C 14/34 (2006.01); C23C 14/35 (2006.01); H01J 37/34 (2006.01); H01L 41/047 (2006.01); H01L 41/09 (2006.01); C04B 35/499 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1873 (2013.01); C04B 35/465 (2013.01); C04B 35/499 (2013.01); C04B 35/62222 (2013.01); C23C 14/08 (2013.01); C23C 14/3414 (2013.01); C23C 14/35 (2013.01); H01J 37/3426 (2013.01); H01L 41/047 (2013.01); H01L 41/096 (2013.01); H01L 41/187 (2013.01); H01L 41/316 (2013.01); H01L 41/332 (2013.01); C04B 2235/3201 (2013.01); C04B 2235/3208 (2013.01); C04B 2235/3236 (2013.01); C04B 2235/3255 (2013.01); C04B 2235/3262 (2013.01);
Abstract
A piezoelectric thin film does not easily generate a heterogeneous phase and exhibits good piezoelectric characteristics. The piezoelectric thin film contains a composition represented by a general formula: (1-n) (KNa)NbO-nCaTiO, wherein m, n, and x in the general formula are within the ranges of 0.87≤m≤0.97, 0≤n≤0.065, and 0≤x≤1.