The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 04, 2019

Filed:

Sep. 10, 2015
Applicant:

Kabushiki Kaisha Toshiba, Minato-ku, JP;

Inventors:

Takahiro Terada, Yokohama, JP;

Masayuki Tanaka, Yokohama, JP;

Shiguma Kato, Yokohama, JP;

Assignee:

Kabushiki Kaisha Toshiba, Minato-ku, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F17D 1/00 (2006.01); H01L 21/67 (2006.01); F17D 1/04 (2006.01); B33Y 80/00 (2015.01); C23C 16/44 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67017 (2013.01); B33Y 80/00 (2014.12); F17D 1/00 (2013.01); F17D 1/04 (2013.01); H01L 21/6719 (2013.01); C23C 16/4412 (2013.01);
Abstract

A flow passage structure includes a member. The member includes a plurality of first openings, a plurality of second openings, a flow passage, and a plurality of joining and branching parts. The flow passage connects the first openings with the second openings. The joining and branching parts are provided in the flow passage and each have a plurality of first parts having respective first ends connected with each other and a plurality of second parts having respective second ends connected with each other. The second parts are closer to the second openings than the first parts are, in a path between the first opening and the second opening. The first ends are connected with the second ends in each joining and branching part.


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