The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2019
Filed:
Jun. 18, 2018
Trumpf Huettinger Gmbh + Co. KG, Freiburg, DE;
Andre Grede, Bern, CH;
Daniel Krausse, Mountain View, CA (US);
Anton Labanc, Ehrenkirchen, DE;
Christan Thome, Freiburg, DE;
Alberto Pena Vidal, Freiburg, DE;
TRUMPF Huettinger GmbH + Co. KG, Freiburg, DE;
Abstract
A power supply system includes a digital-to-analogue converter (DAC) configured to generate an analogue signal and an amplifier path on which the analogue signal is amplified to generate a high-frequency power signal to be provided to a plasma chamber for supplying a plasma process with high-frequency power. The DAC is configured to be connected to an arc detection device that is configured to monitor the plasma chamber for arcs and be controlled by the arc detection device to modify the analogue signal in response to detecting an occurrence of an arc.