The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 04, 2019

Filed:

Aug. 11, 2014
Applicant:

Hrl Laboratories Llc, Malibu, CA (US);

Inventors:

Deborah J. Kirby, Calabasas, CA (US);

Raviv Perahia, Calabasas, CA (US);

Hung Nguyen, Los Angeles, CA (US);

Frederic P. Stratton, Beverly Hills, CA (US);

David T. Chang, Calabasas, CA (US);

Assignee:

HRL Laboratories, LLC, Malibu, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01); B81C 1/00 (2006.01); G01C 21/18 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00285 (2013.01); B81B 3/00 (2013.01); B81B 3/0021 (2013.01); B81B 2201/0235 (2013.01); B81B 2201/0242 (2013.01); B81C 2203/0172 (2013.01); G01C 21/18 (2013.01);
Abstract

A device preferably for use in an inertial navigation system the device having a single IC wafer; a plurality of sensors bonded to bond regions on said single IC wafer, at least one of said bond regions including an opening therein in gaseous communication with a pressure chamber associated with at least one of the plurality of said sensors; and a plurality of caps encapsulating said plurality of sensors, at least one of said plurality of caps forming at least a portion of said pressure chamber. A method of making the device is also disclosed.


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