The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 04, 2019

Filed:

Feb. 28, 2017
Applicant:

Melexis Technologies NV, Tessenderlo, BE;

Inventors:

Laurent Otte, Brussels, BE;

Jian Chen, Heist-op-den-Berg, BE;

Appolonius Jacobus Van Der Wiel, Duisburg, BE;

Assignee:

MELEXIS TECHNOLOGIES NV, Tessenderlo, BE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81B 7/00 (2006.01); B81C 1/00 (2006.01); G01L 9/00 (2006.01); G01L 19/06 (2006.01); G01L 19/14 (2006.01); G01L 23/24 (2006.01);
U.S. Cl.
CPC ...
B81B 7/0058 (2013.01); B81C 1/0023 (2013.01); G01L 9/0054 (2013.01); G01L 19/0645 (2013.01); G01L 19/147 (2013.01); G01L 23/24 (2013.01); B81B 2201/0264 (2013.01); B81B 2207/012 (2013.01); B81B 2207/07 (2013.01); B81B 2207/098 (2013.01); B81B 2207/115 (2013.01); B81C 2203/0792 (2013.01); H01L 2224/48091 (2013.01); H01L 2224/48137 (2013.01);
Abstract

A semiconductor pressure sensor assembly for measuring a pressure of an exhaust gas which contains corrosive components, comprising: a first cavity, a pressure sensor comprising first bondpads for electrical interconnection, a CMOS chip comprising second bondpads for electrical interconnection with the pressure sensor, an interconnection module having electrically conductive paths connected via bonding wires to the pressure sensor and to the CMOS chip; the interconnection module being a substrate with corrosion-resistant metal tracks, wherein the CMOS chip and part of the interconnection module are encapsulated by a plastic package.


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