The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 28, 2019

Filed:

Nov. 28, 2017
Applicant:

Panasonic Intellectual Property Management Co., Ltd., Osaka, JP;

Inventors:

Shinsuke Komatsu, Osaka, JP;

Yoshio Okayama, Osaka, JP;

Masaki Nobuoka, Nara, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 33/00 (2010.01); H01L 21/02 (2006.01); C30B 29/22 (2006.01); H01L 21/78 (2006.01); C30B 29/40 (2006.01); C30B 25/18 (2006.01); C01F 17/00 (2006.01); H01S 5/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/7813 (2013.01); C01F 17/0025 (2013.01); C30B 25/18 (2013.01); C30B 29/403 (2013.01); H01L 21/0254 (2013.01); H01L 21/02428 (2013.01); H01L 33/007 (2013.01); C30B 29/22 (2013.01); H01S 5/0211 (2013.01);
Abstract

An RAMOsubstrate that includes an RAMOmonocrystalline substrate formed of a single crystal represented by general formula RAMO, wherein R represents one or more trivalent elements selected from the group consisting of Sc, In, Y, and lanthanoid elements, A represents one or more trivalent elements selected from the group consisting of Fe(III), Ga, and Al, and M represents one or more divalent elements selected from the group consisting of Mg, Mn, Fe(II), Co, Cu, Zn, and Cd. The RAMOmonocrystalline substrate has a principal surface with a plurality of grooves. The principal surface has an off-angle θ with respect to a cleaving surface of the single crystal. The RAMOmonocrystalline substrate satisfies tan θ≤Wy/Wx, where Wx is the width at the top surface of a raised portion between the grooves, and Wy is the height of the raised portion.


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