The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2019
Filed:
Apr. 27, 2017
Applicant:
Arm Limited, Cambridge, GB;
Inventor:
Gregory Munson Yeric, Austin, TX (US);
Assignee:
ARM Limited, Cambridge, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G06F 17/50 (2006.01); H01L 21/66 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
G06F 17/5081 (2013.01); G03F 7/70383 (2013.01); G03F 7/70433 (2013.01); H01L 21/027 (2013.01); H01L 22/14 (2013.01); H01L 22/20 (2013.01); G06F 2217/12 (2013.01);
Abstract
Integrated circuits are manufactured using a direct write lithography step to at least partially form at least one layer within the integrated circuit. The performance characteristics of an at least partially formed integrated circuit are measured and then the layout design to be applied with a direct write lithography step is varied in dependence upon those performance characteristics. Accordingly, the performance of an individual integrated circuit, wafer of integrated circuits or batch of wafers may be altered.