The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 28, 2019

Filed:

Oct. 19, 2017
Applicants:

Vmicro, Villeneuve d'Ascq, FR;

Centre National DE LA Recherche Scientifique, Paris, FR;

Universite Lille-1, Villeneuve d'Ascq, FR;

Inventors:

Benjamin Walter, Lille, FR;

Marc Faucher, Lesquin, FR;

Estelle Mairiaux-Mage, Lille, FR;

Assignees:

VMICRO, Villeneuve d'Ascq, FR;

CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE, Paris, FR;

UNIVERSITE LILLE-1, Villeneuve d'Ascq, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01Q 20/02 (2010.01); G01Q 60/38 (2010.01); G01Q 70/10 (2010.01); G01Q 10/04 (2010.01); G01Q 20/04 (2010.01);
U.S. Cl.
CPC ...
G01Q 20/02 (2013.01); G01Q 60/38 (2013.01); G01Q 70/10 (2013.01); G01Q 10/045 (2013.01); G01Q 20/04 (2013.01);
Abstract

A probe for atomic force microscopy comprises a tip for atomic force microscopy oriented in a longitudinal direction, wherein: the tip is arranged at one end of a sensitive part of the probe, which is movable or deformable and linked to a support structure, which is anchored to the main surface of the substrate; the sensitive portion and the support structure are planar elements, extending mainly in planes that are parallel to the main surface of the substrate; the sensitive portion is linked to the support structure via at least one element allowing the sensitive portion to be displaced or to be extended in this direction; and the tip, the sensitive part and the support structure protrude from an edge of the substrate in the longitudinal direction. An atomic force microscope comprising at least one such probe is also provided.


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