The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 28, 2019

Filed:

May. 30, 2017
Applicant:

Horiba Stec, Co., Ltd., Kyoto-shi, Kyoto, JP;

Inventors:

Kotaro Takijiri, Kyoto, JP;

Atsushi Ieki, Kyoto, JP;

Yuki Tanaka, Kyoto, JP;

Assignee:

HORIBA STEC, Co., Ltd., Kyoto-shi, Kyoto, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K 37/00 (2006.01); G01F 1/696 (2006.01); G05B 13/02 (2006.01); G05D 7/06 (2006.01); G01F 15/00 (2006.01);
U.S. Cl.
CPC ...
G01F 1/6965 (2013.01); F16K 37/005 (2013.01); G01F 15/005 (2013.01); G05B 13/021 (2013.01); G05D 7/0629 (2013.01); G05D 7/0635 (2013.01); F16K 37/0091 (2013.01);
Abstract

An operator is able to easily perform down-tuning while still achieving superior responsiveness and, in some cases, obtain an equivalent responsiveness as that obtained from the flow rate control device currently being used. In a flow rate control device that performs feedback control of a fluid control valve such that a measured flow rate closely approximates a target flow rate, there are provided a response lag input section that inputs a response lag set value, which is a value showing a response lag that an operator wishes to set, and a response lag generating section that generates response lags used in the feedback control in accordance with the response lag set values.


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