The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2019
Filed:
Apr. 14, 2017
Applicant:
Samsung Electro-mechanics Co., Ltd., Suwon-si, KR;
Inventors:
Moon Chul Lee, Suwon-si, KR;
Jae Chang Lee, Suwon-si, KR;
Chang Hyun Lim, Suwon-si, KR;
Tae Hun Lee, Suwon-si, KR;
Tae Kyung Lee, Suwon-si, KR;
Tae Yoon Kim, Suwon-si, KR;
Assignee:
Samsung Electro-Mechanics Co., Ltd., Suwon-si, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H03H 9/02 (2006.01); H01L 41/047 (2006.01); H03H 9/54 (2006.01); H03H 9/56 (2006.01); H03H 9/17 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02102 (2013.01); H01L 41/047 (2013.01); H03H 9/542 (2013.01); H03H 9/564 (2013.01); H03H 9/173 (2013.01);
Abstract
A bulk acoustic wave resonator includes: a substrate; a cavity forming layer disposed on the substrate so as to form a cavity; a lower electrode disposed on the cavity; a piezoelectric layer disposed on the lower electrode; an upper electrode disposed on the piezoelectric layer; and a temperature compensation layer disposed below the lower electrode and in the cavity portion.