The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2019
Filed:
Jun. 17, 2016
Thomas J. Knight, Silver Springs, MD (US);
Thomas J. Knight, Silver Springs, MD (US);
NORTHROP GRUMMAN SYSTEMS CORPORATION, Falls Church, VA (US);
Abstract
A stacked interconnect structure includes a first conductive layer, a second conductive layer, and a first dielectric layer disposed between the first and second conductive layers and having an air gap in a portion of the first dielectric layer that separates the first and second conductive layers. A second dielectric layer is parallel to the first conductive layer, a third dielectric layer overlays a portion of the second dielectric layer and contacts two opposing surfaces of the second conductive layer. A first via extends into the air gap of the first dielectric layer, wherein the second conductive layer is separated from the first via by a portion of the third dielectric layer that extends from a given surface of the third dielectric layer to the second dielectric layer, and a second via that extends from the given surface of the third dielectric layer to the second conductive layer.